MEMS foundry and fabrication services for MEMS applications | Martini Tech

MEMS foundry and fabrication services for MEMS applications

MEMS foundry services

Martini Tech, in collaboration with Japanese companies, offers several MEMS foundry services such as: annealing, doping, thin-film deposition, dry etching, photolithography, wet process, inspection and measurement.
Martini Tech offers not only MEMS fabrication process support, but also MEMS design and development support.
Please have a look at our MEMS design and development page for more information.

Doping and annealDoping and anneal
Thin film depositionThin film deposition
EtchingEtching
Wet ProcessWet Process
BondingBonding
PolishingPolishing
Inspection and measurementInspection and measurement
Doping and anneal

Services available:

  • Furnace
Thin film deposition

Services available:

  • Low pressure plasma CVD
  • Atmospheric pressure plasma CVD
  • MOCVD
  • Evaporation
  • Sputtering
Etching

Services available:

  • RIE
  • Deep RIE
  • Sacrificial layer dry etching
  • Ion milling
  • Plasma ashing
  • ECR RIE
Photolithography

Services available:

  • Mask aligner
  • Spin coater
  • Stepper
Wet process

Services available:

  • Inorganic draft
  • Organic draft
  • MS cleaning system
Bonding

Services available:

  • Thermo-compression bonding
  • Anodic bonding
  • Wire bonding
Polishing

Services available:

  • CMP
Inspection and measurement

Services available:

  • SEM
  • Optical film thickness measurement gauge
  • Stylus profiler
  • Sheet resistance measurement system
  • Stress measurement system