MEMS design – accelerometers, gyroscopes, sensors, other MEMS devices | Martini Tech

MEMS design and development

MEMS design and development

Martini Tech offers MEMS design and development services in collaboration with a leader Japanese MEMS company.
We currently have experience in manufacturing of the following kinds of MEMS: printer heads, pressure sensors, other MEMS sensor devices, MEMS accelerometer devices, MEMS gyroscope devices, optical scanners, cantilevers, digital mirror devices, HDD heads, DNA chips, optical switches, lasers and modulators among others.
Details about the available equipment can be found in our MEMS foundry page.
MEMS devices
Printer heads (for inkjet printers) Digital mirror devices (DMD)
Pressure sensors HDD heads
Acceleration sensors DNA chips
Gyroscopes Optical switches
Optical scanners Bolometer type infrared image sensors
Cantilevers for AFM Wavelength variable lasers
Flow path modules Optical modulators
Available MEMS applications

High frequency applications
  • High frequency switches
  • Filters
  • Replacements for crystal resonators
Optical applications
  • Optical switches
  • Optical scanners
  • Projection type displays
  • Electronic paper
  • Head-mounted displays
Hydraulic applications
  • Micro valves
  • Micro flow paths
Biochemistry applications
  • DNA analysis chips
  • Protein analysis chips
Medical applications
  • Blood test chips
  • Active catheters
  • Drug delivery systems
Sensors
  • Pressure sensors
  • Contact sensors
  • Inertial sensors
  • Acceleration sensors
  • Gyro sensors
  • Chemical sensors
  • Microphones
Space applications
  • Micro thrusters
  • Micro calorie meters
MEMS technology processes
Process family Process name Details
Bulk micromachining Etching Sacrificial layer etching
Deep etching: ICP-RIE
Anisotropic etching
Multistage etching
Surface micromachining Lithography Photolithography
LIGA
3-D lithography
Electron beam
Bonding Direct bonding
Anodic bonding
MEMS actuators
Actuator family Description Details
Static electricity actuators They are simple in construction and suitable for miniaturization. Generated power is smaller than actuators built with other technologies. Parallel, flat-type, static actuators
Comb-drive electrostatic actuators
Scratch drive actuators (SDAs)
Static micro motors
Electromagnetic power actuators They are difficult in construction and large in size in comparison with the static electricity type due to use of coils and magnet, but they generate more power. Electromagnetic force actuators
Magnetostriction actuators
Piezo-electric effect actuators They generate more power than comparable technologies but the displacement they produce is small. Piezo-electric actuators
Piezo-electric bimorph actuators
Thermal distortion actuators They are simple in construction and generate much power but they may be unstable due to drift Heat bimorph actuators
Thermal expansion type actuators