MEMS design and development
Martini Tech offers MEMS design and development services in collaboration with a leader Japanese MEMS company.
We currently have experience in manufacturing of the following kinds of MEMS: printer heads, pressure sensors, other MEMS sensor devices, MEMS accelerometer devices, MEMS gyroscope devices, optical scanners, cantilevers, digital mirror devices, HDD heads, DNA chips, optical switches, lasers and modulators among others.
Details about the available equipment can be found in our MEMS foundry page.
We currently have experience in manufacturing of the following kinds of MEMS: printer heads, pressure sensors, other MEMS sensor devices, MEMS accelerometer devices, MEMS gyroscope devices, optical scanners, cantilevers, digital mirror devices, HDD heads, DNA chips, optical switches, lasers and modulators among others.
Details about the available equipment can be found in our MEMS foundry page.
MEMS devices
| Printer heads (for inkjet printers) | Digital mirror devices (DMD) |
| Pressure sensors | HDD heads |
| Acceleration sensors | DNA chips |
| Gyroscopes | Optical switches |
| Optical scanners | Bolometer type infrared image sensors |
| Cantilevers for AFM | Wavelength variable lasers |
| Flow path modules | Optical modulators |
Available MEMS applications
| High frequency applications |
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| Optical applications |
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| Hydraulic applications |
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| Biochemistry applications |
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| Medical applications |
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| Sensors |
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| Space applications |
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MEMS technology processes
| Process family | Process name | Details |
| Bulk micromachining | Etching | Sacrificial layer etching |
| Deep etching: ICP-RIE | ||
| Anisotropic etching | ||
| Multistage etching | ||
| Surface micromachining | Lithography | Photolithography |
| LIGA | ||
| 3-D lithography | ||
| Electron beam | ||
| Bonding | Direct bonding | |
| Anodic bonding |
MEMS actuators
| Actuator family | Description | Details |
| Static electricity actuators | They are simple in construction and suitable for miniaturization. Generated power is smaller than actuators built with other technologies. | Parallel, flat-type, static actuators |
| Comb-drive electrostatic actuators | ||
| Scratch drive actuators (SDAs) | ||
| Static micro motors | ||
| Electromagnetic power actuators | They are difficult in construction and large in size in comparison with the static electricity type due to use of coils and magnet, but they generate more power. | Electromagnetic force actuators |
| Magnetostriction actuators | ||
| Piezo-electric effect actuators | They generate more power than comparable technologies but the displacement they produce is small. | Piezo-electric actuators |
| Piezo-electric bimorph actuators | ||
| Thermal distortion actuators | They are simple in construction and generate much power but they may be unstable due to drift | Heat bimorph actuators |
| Thermal expansion type actuators | ||